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MLC 陶瓷测试基板
高性能、高层数MLC测试基板满足多样化的应用场景

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MLC 陶瓷测试基板
澳门威威尼斯棋牌大乐薄膜陶瓷基板技术路线
Time2022.H22023.H12023.H4
Wafer14nm7nm5nm
LTCC Substate Size150*150mm200*200mm300*300mm
LTCC Satck up20Layer30Layer>50Layer
LTCC Pad Pitch250μm150μm120μm
LTCC Line/Space100/100μm50/50μm30/50μm
LTCC Flatness≤ 10μm≤ 10μm≤ 10μm
Thin Film Stack up1Layer3Layer6Layer
Thin Film Pad Pitch85μm50μm30μm
Thin Film Line/Space18/25μm10/10μm5/5μm
Thin-Film MLC切面示意图
基板效果图

MLO 有机测试基板
高性能、高层数MLO测试基板满足多样化的应用场景

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MLO 有机测试基板
Probe Card Interposer Specifictions,Top to Bottom
SpecificationZENFOCUS
Bump pitch I/O ares or w/b pad pitch50um,60um,80um,100um+
Maximum die size or multi-die array size100mm  X  100mm
Type (Interposer)Organic Build-up with Core & Coreless
MaterialNormal substrate material
# of Build-up layers (per side)2~14 (max)
# of Core layers2~14 (max)
Maximum number of separate power leves requiring a planedepend on Current and Voltage of IC
Core via pith350um+
Core via diameter130um+
Buld-up lines and spaces requirement (include top layer)14~20um/14~20um
Thickness requirement1.0~3.0mm
Flatness requirement

< 50um (size 50*50mm or smaller
< 75um (size 50*50mm or smaller

Top layer metallurgy (die side)Hard Gold or ENEPIG (Au thickness>0.30um)
Top layer to die contact typeNeedle
Bottion layer metallurgy (probe card side)ENIG or ENEPIG
Bottion layer to probe card contact typeSolder (Both Pb & free)
Maximum life of interposer,both time and touch-downsN/A
MLO实例&规格
    • 层数: 24 层 (10 + 4 + 10)

    • 厚度: 1.4 mm

    • 尺寸: 70 x70 mm

    • C4 Pitch: 85μm

    • Site数量: 8

    • 层数: 10 层 (4 + 2 + 4)

    • 厚度: 1.5 mm

    • 尺寸: 45.48 x18 mm

    • C4 Pitch: 54μm

    • Site数量: 16

MLO焊接方式
植球工艺
MLO焊接方式